SIGMAKOKI Precision Small ZF Axis Automated Stage Movement Amount 5mm 60 x 60mm　OSMS60-5ZF

Feature

• Z-axis stepping motor drive stage for measurement and inspection with high rigidity and accuracy.
• Stage planes that move up and down are horizontal, providing smooth movement.
• A compact horizontal Z-axis stage with a motor built into the main body by the company's unique space-saving design.
• Since the protrusion part is suppressed as much as possible, it is also ideal for the device integration application.

Specifications

• [ Common specification]
• Motor type: 5 phase stepping motor 0.75A/phase (oriental motor (Co., Ltd)), OSMS40-5ZF is 035A/phase
• Motor product number: OSMS40-5ZF : PK513PA-C21 (□20mm) , OSMS60-5ZF/10ZF : PK523HPB-C12 (□28mm) , OSMS80-20ZF : A7177-90215KTG (□28mm)
• Motor step angle: 0.72 (OSMS80-20ZF is, 0.036°)
• Sensor power voltage: DC5 - 24V±10%
• Sensor power consumption: 40mA or less (20mA or less per 1 sensor)
• Sensor control output: NPN open collector output DC 30V or less 50mA or less
• Sensor output logic: When shading: Output transistor OFF (non-conducting)
• Compatible driver: OSMS40-5ZF : SG-5MA, SG-55MA, SG-514MSC, OSMS60-5ZF/10ZF : SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL, OSMS80-20ZF : SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
• Compatible controller: GSC-01, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
• [Individual specification]
• Movement amount: 5mm
• Table surface size: 60 x 60mm
• Feed crew: Ball screw diameter φ6mm, Lead 1mm
• Movement guide: Outer rail structure
• Stage top side material: Aluminum
• Surface treatment: Black anodic oxide
• Mass: 0.6kg
• Resolution (full): 2μm/Pulse
• Resolution (half): 1μm/pulse
• Max speed: 4mm/sec
• Repeatable positioning accuracy: 10μm
• Withstand load: 39.2N (4.0kgf)
• Moment rigidity/pitch: 0.4″/N・cm
• Moment rigidity/yaw: 1″/N・cm
• Moment rigidity/roll: 1″/N・cm
• Lost motion: 5μm
• Parallelism: 50μm
• Running parallelism: 15μm
• Pitching: 20″
• Sensor product number: Micro photo sensor: GP1S097HCZ0F (Sharp Corporation): Limit sensor
• Limit sensors: Is available (NORMAL CLOSE)
• Origin sensor: No
• Proximity origin sensor: No
• CE conform product
• RoHS conform product